78016 20190227103821.0 doi 10.1016/j.memsci.2014.02.007 sideral 86903 ART-2014-86903 eng (orcid)0000-0002-8448-7543 Pellejero, I. Reinforced SIL-1 micromembranes integrated on chip: APPLICATION to CO2 separation 2014 Access copy available to the general public Unrestricted A novel 4-step microfabrication process is proposed in this work to prepare arrays of c-oriented silicalite (SIL-1) micromembranes on customized silicon nitride (Si3Nx) microsieves. The arrays are integrated on chip and their overall porosity values can be tuned from 1.6% to 19.9%. A low stress Si3Nx microfabricated sieve has been used as support to reinforce via mechanical interlocking and to reduce the effects of the residual stress during membrane processing. The secondary hydrothermal growth over the Si3Nx microsieves also changes the SIL-1 chemistry, improving its affinity towards CO2 adsorption. As a result, the SIL-1/Si3Nx micromembranes integrated on chip facilitate the preferential permeation of CO2 in CO2/H2 mixtures, showing a maximum CO2/H2 separation factor of 16.9 and a CO2 permeance of 8.2×10-7 mol m-2 s-1 Pa-1 at ambient conditions. info:eu-repo/semantics/openAccess by-nc-nd http://creativecommons.org/licenses/by-nc-nd/3.0/es/ 5.056 2014 POLYMER SCIENCE 7 / 82 = 0.085 2014 Q1 T1 ENGINEERING, CHEMICAL 7 / 135 = 0.052 2014 Q1 T1 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion (orcid)0000-0002-4931-1358 Urbiztondo, M. A. Universidad de Zaragoza (orcid)0000-0001-9897-6527 Pina, M. P. Universidad de Zaragoza (orcid)0000-0002-8701-9745 Santamaría, J. Universidad de Zaragoza 5005 555 Universidad de Zaragoza Dpto. Ing.Quím.Tecnol.Med.Amb. Área Ingeniería Química 5005 790 Universidad de Zaragoza Dpto. Ing.Quím.Tecnol.Med.Amb. Área Tecnologi. Medio Ambiente 460 (2014), 34-45 J. membr. sci. JOURNAL OF MEMBRANE SCIENCE 0376-7388 698368 http://zaguan.unizar.es/record/78016/files/texto_completo.pdf Postprint 28210 http://zaguan.unizar.es/record/78016/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:78016 articulos driver 2019-02-27-10:20:35 ARTICLE