78259 20200117211558.0 doi 10.1016/j.carbon.2017.12.033 sideral 104127 ART-2018-104127 eng Dago, A.I. Chemical and structural analysis of sub-20 nm graphene patterns generated by scanning probe lithography 2018 Access copy available to the general public Unrestricted Sub-20 nm patterns have been fabricated by using oxidation scanning probe lithography on epitaxial graphene. The structural and chemical properties of these nanopatterns have been characterized by high resolution transmission electron microscopy, energy dispersive X-ray spectroscopy and electron energy loss spectroscopy. The electron microscopy images reveal that the nanolithography process modifies the graphene monolayer and a thin region of the SiC substrate (1 nm thick). Spatially-resolved electron spectroscopies show that the nanopatterns are made of graphene oxide. The combination of spatially-resolved structural and chemical analysis of graphene nanopatterns will enable the development of high-performance graphene devices. info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-2-R info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-1-R info:eu-repo/grantAgreement/ES/MINECO-FEDER/MAT2016-76507-R info:eu-repo/grantAgreement/EC/FP7/318804/EU/Single Nanometer Manufacturing for beyond CMOS devices/SNM info:eu-repo/semantics/openAccess All rights reserved http://www.europeana.eu/rights/rr-f/ 7.466 2018 MATERIALS SCIENCE, MULTIDISCIPLINARY 33 / 293 = 0.113 2018 Q1 T1 CHEMISTRY, PHYSICAL 27 / 148 = 0.182 2018 Q1 T1 2.116 2018 Materials Science (miscellaneous) 2018 Q1 Chemistry (miscellaneous) 2018 Q1 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion (orcid)0000-0002-4123-487X Sangiao, S. Universidad de Zaragoza (orcid)0000-0002-6813-780X Fernández-Pacheco, R. Universidad de Zaragoza (orcid)0000-0001-9566-0738 De Teresa, J.M. Universidad de Zaragoza Garcia, R. 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 129 (2018), 281-285 Carbon Carbon 0008-6223 670544 http://zaguan.unizar.es/record/78259/files/texto_completo.pdf Postprint 60414 http://zaguan.unizar.es/record/78259/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:78259 articulos driver 2020-01-17-21:10:01 ARTICLE