000079029 001__ 79029
000079029 005__ 20200716101432.0
000079029 0247_ $$2doi$$a10.1088/1361-6501/ab046e
000079029 0248_ $$2sideral$$a111565
000079029 037__ $$aART-2019-111565
000079029 041__ $$aeng
000079029 100__ $$0(orcid)0000-0002-1093-8233$$aPerez, P.$$uUniversidad de Zaragoza
000079029 245__ $$aLateral error compensation for stitching-free measurement with focus variation microscopy
000079029 260__ $$c2019
000079029 5060_ $$aAccess copy available to the general public$$fUnrestricted
000079029 5203_ $$aThis paper proposes a practical methodology to quantify and compensate lateral errors for focus variation microscopy measurements without stitching. The main advantages of this new methodology are its fast and simple implementation using any uncalibrated artefact. The methodology is applied by performing measurements with multiple image fields with and without stitching on an uncalibrated artefact and using the stitched measurements as reference. To quantify the lateral errors, the determination of their geometrical components is carried out through kinematic modelling. With the quantified errors, compensation can be applied for lateral measurements without stitching. Over the entire 200mm lateral range, the lateral errors without stitching and without compensation can reach up to 180 mu m. With the proposed error compensation methodology, the lateral errors have been reduced to around 15 mu m. The proposed methodology can be applied to any Cartesian-based optical measuring instrument.
000079029 536__ $$9info:eu-repo/grantAgreement/ES/MINECO/EEBB-I-17-12430
000079029 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000079029 590__ $$a1.857$$b2019
000079029 592__ $$a0.551$$b2019
000079029 591__ $$aENGINEERING, MULTIDISCIPLINARY$$b43 / 91 = 0.473$$c2019$$dQ2$$eT2
000079029 593__ $$aEngineering (miscellaneous)$$c2019$$dQ1
000079029 591__ $$aINSTRUMENTS & INSTRUMENTATION$$b32 / 64 = 0.5$$c2019$$dQ2$$eT2
000079029 593__ $$aInstrumentation$$c2019$$dQ2
000079029 593__ $$aApplied Mathematics$$c2019$$dQ2
000079029 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000079029 700__ $$aSyam, W.P.
000079029 700__ $$0(orcid)0000-0003-4839-0610$$aAlbajez, J.A.$$uUniversidad de Zaragoza
000079029 700__ $$0(orcid)0000-0001-7316-0003$$aSantolaria, J.$$uUniversidad de Zaragoza
000079029 700__ $$aLeach, R.
000079029 7102_ $$15002$$2515$$aUniversidad de Zaragoza$$bDpto. Ingeniería Diseño Fabri.$$cÁrea Ing. Procesos Fabricación
000079029 773__ $$g30, 6 (2019), 065002 [9 pp]$$pMeas. sci. technol.$$tMEASUREMENT SCIENCE & TECHNOLOGY$$x0957-0233
000079029 8564_ $$s656181$$uhttps://zaguan.unizar.es/record/79029/files/texto_completo.pdf$$yVersión publicada
000079029 8564_ $$s103285$$uhttps://zaguan.unizar.es/record/79029/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000079029 909CO $$ooai:zaguan.unizar.es:79029$$particulos$$pdriver
000079029 951__ $$a2020-07-16-08:50:54
000079029 980__ $$aARTICLE