000085461 001__ 85461 000085461 005__ 20210104111916.0 000085461 0247_ $$2doi$$a10.1021/acs.nanolett.9b02351 000085461 0248_ $$2sideral$$a114526 000085461 037__ $$aART-2019-114526 000085461 041__ $$aeng 000085461 100__ $$aGruber, G. 000085461 245__ $$aMass Sensing for the Advanced Fabrication of Nanomechanical Resonators 000085461 260__ $$c2019 000085461 5060_ $$aAccess copy available to the general public$$fUnrestricted 000085461 5203_ $$aWe report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods. 000085461 536__ $$9info:eu-repo/grantAgreement/EC/H2020/862149/EU/Room Temperature Magnetic Resonance Force Microscopy/RTMFRM$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 758794-Q-ROOT$$9info:eu-repo/grantAgreement/EC/H2020/758794/EU/Quantum optomechanics at ROOm Temperature/Q-ROOT$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 692876-NaTuRe$$9info:eu-repo/grantAgreement/EC/H2020/692876/EU/Nanotube Mechanical Resonator, Spin, and Superfluidity/NaTuRe$$9info:eu-repo/grantAgreement/ES/DGA/E13-17R$$9This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 862149-RTMFRM$$9info:eu-repo/grantAgreement/ES/MINECO/FIS2015-69831-P$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MINECO/RTI2018-097953-B-I00$$9info:eu-repo/grantAgreement/ES/MINECO/SEV-2015-0522 000085461 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc$$uhttp://creativecommons.org/licenses/by-nc/3.0/es/ 000085461 590__ $$a11.238$$b2019 000085461 591__ $$aCHEMISTRY, PHYSICAL$$b18 / 159 = 0.113$$c2019$$dQ1$$eT1 000085461 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b25 / 314 = 0.08$$c2019$$dQ1$$eT1 000085461 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b14 / 103 = 0.136$$c2019$$dQ1$$eT1 000085461 591__ $$aPHYSICS, CONDENSED MATTER$$b8 / 69 = 0.116$$c2019$$dQ1$$eT1 000085461 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b19 / 177 = 0.107$$c2019$$dQ1$$eT1 000085461 591__ $$aPHYSICS, APPLIED$$b11 / 154 = 0.071$$c2019$$dQ1$$eT1 000085461 592__ $$a5.786$$b2019 000085461 593__ $$aBioengineering$$c2019$$dQ1 000085461 593__ $$aChemistry (miscellaneous)$$c2019$$dQ1 000085461 593__ $$aNanoscience and Nanotechnology$$c2019$$dQ1 000085461 593__ $$aMaterials Science (miscellaneous)$$c2019$$dQ1 000085461 593__ $$aMechanical Engineering$$c2019$$dQ1 000085461 593__ $$aCondensed Matter Physics$$c2019$$dQ1 000085461 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000085461 700__ $$aUrgell, C. 000085461 700__ $$aTavernarakis, A. 000085461 700__ $$aStavrinadis, A.: Tepsic, S. 000085461 700__ $$0(orcid)0000-0002-6761-6171$$aMagén, C.$$uUniversidad de Zaragoza 000085461 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, S.$$uUniversidad de Zaragoza 000085461 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, J.M.$$uUniversidad de Zaragoza 000085461 700__ $$aVerlot, P. 000085461 700__ $$aBachtold, A. 000085461 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada 000085461 773__ $$g19, 10 (2019), 6987-6992$$pNano lett.$$tNano Letters$$x1530-6984 000085461 8564_ $$s2501024$$uhttps://zaguan.unizar.es/record/85461/files/texto_completo.pdf$$yVersión publicada 000085461 8564_ $$s116504$$uhttps://zaguan.unizar.es/record/85461/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000085461 909CO $$ooai:zaguan.unizar.es:85461$$particulos$$pdriver 000085461 951__ $$a2021-01-04-11:06:30 000085461 980__ $$aARTICLE