85461 20250530091011.0 doi 10.1021/acs.nanolett.9b02351 sideral 114526 ART-2019-114526 eng Gruber, G. Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators 2019 Access copy available to the general public Unrestricted We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods. info:eu-repo/grantAgreement/ES/DGA/E13-17R info:eu-repo/grantAgreement/EC/H2020/692876/EU/Nanotube Mechanical Resonator, Spin, and Superfluidity/NaTuRe This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 692876-NaTuRe info:eu-repo/grantAgreement/EC/H2020/758794/EU/Quantum optomechanics at ROOm Temperature/Q-ROOT This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 758794-Q-ROOT info:eu-repo/grantAgreement/EC/H2020/862149/EU/Room Temperature Magnetic Resonance Force Microscopy/RTMFRM This project has received funding from the European Union’s Horizon 2020 research and innovation program under grant agreement No H2020 862149-RTMFRM info:eu-repo/grantAgreement/ES/MINECO/FIS2015-69831-P info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R info:eu-repo/grantAgreement/ES/MINECO/RTI2018-097953-B-I00 info:eu-repo/grantAgreement/ES/MINECO/SEV-2015-0522 info:eu-repo/semantics/openAccess by-nc http://creativecommons.org/licenses/by-nc/3.0/es/ 11.238 2019 CHEMISTRY, PHYSICAL 18 / 159 = 0.113 2019 Q1 T1 MATERIALS SCIENCE, MULTIDISCIPLINARY 25 / 314 = 0.08 2019 Q1 T1 NANOSCIENCE & NANOTECHNOLOGY 14 / 103 = 0.136 2019 Q1 T1 PHYSICS, CONDENSED MATTER 8 / 69 = 0.116 2019 Q1 T1 CHEMISTRY, MULTIDISCIPLINARY 19 / 176 = 0.108 2019 Q1 T1 PHYSICS, APPLIED 11 / 154 = 0.071 2019 Q1 T1 5.786 2019 Bioengineering 2019 Q1 Chemistry (miscellaneous) 2019 Q1 Nanoscience and Nanotechnology 2019 Q1 Materials Science (miscellaneous) 2019 Q1 Mechanical Engineering 2019 Q1 Condensed Matter Physics 2019 Q1 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Urgell, C. Tavernarakis, A. Stavrinadis, A.: Tepsic, S. Magén, C. Universidad de Zaragoza (orcid)0000-0002-6761-6171 Sangiao, S. Universidad de Zaragoza (orcid)0000-0002-4123-487X De Teresa, J.M. Universidad de Zaragoza (orcid)0000-0001-9566-0738 Verlot, P. Bachtold, A. 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 19, 10 (2019), 6987-6992 Nano lett. Nano Letters 1530-6984 2501024 http://zaguan.unizar.es/record/85461/files/texto_completo.pdf Versión publicada 116504 http://zaguan.unizar.es/record/85461/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:85461 articulos driver 2025-05-30-09:05:04 ARTICLE