2D positioning control system for the planar motion of a nanopositioning platform

Díaz-Pérez, Lucía (Universidad de Zaragoza) ; Torralba, Marta ; Albajez, José Antonio (Universidad de Zaragoza) ; Yagüe-Fabra, José Antonio (Universidad de Zaragoza)

Resumen: A novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. For control hardware, this work proposes the use of a commercial generic solution, in contrast to other systems where the control hardware and software are specifically designed for that purpose. In a previous paper based on this research, the control system of one linear motor implemented in selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range.

Idioma: Inglés

DOI: 10.3390/app9224860

Año: 2019

Publicado en: Applied Sciences (Switzerland) 9, 22 (2019), 4860 [17 pp.]
ISSN: 2076-3417

Factor impacto JCR: 2.474 (2019)

Categ. JCR: PHYSICS, APPLIED rank: 62 / 154 = 0.403 (2019) - Q2 - T2
Categ. JCR: ENGINEERING, MULTIDISCIPLINARY rank: 32 / 91 = 0.352 (2019) - Q2 - T2
Categ. JCR: CHEMISTRY, MULTIDISCIPLINARY rank: 88 / 176 = 0.5 (2019) - Q2 - T2
Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 161 / 314 = 0.513 (2019) - Q3 - T2

Factor impacto SCIMAGO: 0.418 - Engineering (miscellaneous) (Q1) - Fluid Flow and Transfer Processes (Q2) - Process Chemistry and Technology (Q2) - Instrumentation (Q2) - Materials Science (miscellaneous) (Q2) - Computer Science Applications (Q3)

Financiación: info:eu-repo/grantAgreement/ES/DGA/T56-17R
Financiación: info:eu-repo/grantAgreement/ES/MICINN/RTI2018-097191-B-I00

Tipo y forma: Artículo (Versión definitiva)

Área (Departamento): Área Ing. Procesos Fabricación (Dpto. Ingeniería Diseño Fabri.)