87750 20230914083241.0 doi 10.3390/app9224860 sideral 115878 ART-2019-115878 eng Díaz-Pérez, Lucía Universidad de Zaragoza (orcid)0000-0003-3823-7903 2D positioning control system for the planar motion of a nanopositioning platform 2019 Access copy available to the general public Unrestricted A novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. For control hardware, this work proposes the use of a commercial generic solution, in contrast to other systems where the control hardware and software are specifically designed for that purpose. In a previous paper based on this research, the control system of one linear motor implemented in selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range. info:eu-repo/grantAgreement/ES/DGA/T56-17R info:eu-repo/grantAgreement/ES/MICINN/RTI2018-097191-B-I00 info:eu-repo/semantics/openAccess by http://creativecommons.org/licenses/by/3.0/es/ 2.474 2019 PHYSICS, APPLIED 62 / 154 = 0.403 2019 Q2 T2 ENGINEERING, MULTIDISCIPLINARY 32 / 91 = 0.352 2019 Q2 T2 CHEMISTRY, MULTIDISCIPLINARY 88 / 176 = 0.5 2019 Q2 T2 MATERIALS SCIENCE, MULTIDISCIPLINARY 161 / 314 = 0.513 2019 Q3 T2 0.418 2019 Engineering (miscellaneous) 2019 Q1 Fluid Flow and Transfer Processes 2019 Q2 Process Chemistry and Technology 2019 Q2 Instrumentation 2019 Q2 Materials Science (miscellaneous) 2019 Q2 Computer Science Applications 2019 Q3 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Torralba, Marta (orcid)0000-0002-3069-2736 Albajez, José Antonio Universidad de Zaragoza (orcid)0000-0003-4839-0610 Yagüe-Fabra, José Antonio Universidad de Zaragoza (orcid)0000-0001-7152-4117 5002 515 Universidad de Zaragoza Dpto. Ingeniería Diseño Fabri. Área Ing. Procesos Fabricación 9, 22 (2019), 4860 [17 pp.] Appl. sci. Applied Sciences (Switzerland) 2076-3417 3491155 http://zaguan.unizar.es/record/87750/files/texto_completo.pdf Versión publicada 503485 http://zaguan.unizar.es/record/87750/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:87750 articulos driver 2023-09-13-10:48:41 ARTICLE