94516 20230921135433.0 doi 10.1016/j.promfg.2019.07.053 sideral 118482 ART-2019-118482 eng Díaz-Pérez, Lucía Universidad de Zaragoza (orcid)0000-0003-3823-7903 Positioning uncertainty of the control system for the planar motion of a nanopositioning platform 2019 Access copy available to the general public Unrestricted The novel nanopositioning platform (NanoPla) that is in development at the University of Zaragoza has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. The 2D movement is performed by four custom-made Halbach linear motors and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. As control hardware, this work proposes the use of a commercial solution, in contrast to other systems, where the control hardware and software were specifically designed for the purpose. In a previous work of this research, the control system of one linear motor implemented in the selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate a 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range. info:eu-repo/grantAgreement/ES/DGA/T56-17R info:eu-repo/grantAgreement/ES/MINECO/DPI2015-69403-C3-1-R info:eu-repo/semantics/openAccess by-nc-nd http://creativecommons.org/licenses/by-nc-nd/3.0/es/ 0.516 2019 Industrial and Manufacturing Engineering 2019 Q2 Artificial Intelligence 2019 Q2 info:eu-repo/semantics/article info:eu-repo/semantics/publishedVersion Torralba, Marta (orcid)0000-0002-3069-2736 Albajez, José Antonio Universidad de Zaragoza (orcid)0000-0003-4839-0610 Yagüe Fabra, José Antonio Universidad de Zaragoza (orcid)0000-0001-7152-4117 5002 515 Universidad de Zaragoza Dpto. Ingeniería Diseño Fabri. Área Ing. Procesos Fabricación 41 (2019), 249-256 Procedia Manufacturing 2351-9789 1131262 http://zaguan.unizar.es/record/94516/files/texto_completo.pdf Versión publicada 304118 http://zaguan.unizar.es/record/94516/files/texto_completo.jpg?subformat=icon icon Versión publicada oai:zaguan.unizar.es:94516 articulos driver 2023-09-21-13:30:34 ARTICLE