000095533 001__ 95533
000095533 005__ 20200930113515.0
000095533 0247_ $$2doi$$a10.1088/1361-6528/ab423c
000095533 0248_ $$2sideral$$a114527
000095533 037__ $$aART-2019-114527
000095533 041__ $$aeng
000095533 100__ $$0(orcid)0000-0001-6771-6941$$aPablo-Navarro, Javier$$uUniversidad de Zaragoza
000095533 245__ $$aDiameter modulation of 3D nanostructures in focused electron beam induced deposition using local electric fields and beam defocus
000095533 260__ $$c2019
000095533 5060_ $$aAccess copy available to the general public$$fUnrestricted
000095533 5203_ $$aFocused electron beam induced deposition (FEBID) is a leading nanolithography technique in
terms of resolution and the capability for three-dimensional (3D) growth of functional nanostructures. However, FEBID still presents some limitations with respect to the precise control of the dimensions of the grown nano-objects as well as its use on insulating substrates. In the present work, we overcome both limitations by employing electrically-biased metal structures patterned on the surface of insulating substrates. Such patterned metal structures serve for charge dissipation and also allow the application of spatially-dependent electric fields. We demonstrate that such electric fields can dramatically change the dimensions of the growing 3D nanostructures by acting on the primary electron beam and the generated secondary electrons. In the performed experiments, the diameter of Pt-C and W-C vertical nanowires grown on quartz, MgO and amorphous SiO2 is tuned by application of moderate voltages (up to 200 V) on the patterned metal microstructures during growth, achieving diameters as small as 50 nm. We identify two competing effects arising from the generated electric fields: a slight change in the primary beam focus point and a strong action on the secondary electrons. Beam defocus is exploited to achieve the in situ modulation of the diameter of 3D FEBID structures during growth.
000095533 536__ $$9info:eu-repo/grantAgreement/ES/DGA/E13-17R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R
000095533 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
000095533 590__ $$a3.551$$b2019
000095533 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b109 / 314 = 0.347$$c2019$$dQ2$$eT2
000095533 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b51 / 103 = 0.495$$c2019$$dQ2$$eT2
000095533 591__ $$aPHYSICS, APPLIED$$b40 / 154 = 0.26$$c2019$$dQ2$$eT1
000095533 592__ $$a1.026$$b2019
000095533 593__ $$aMaterials Science (miscellaneous)$$c2019$$dQ1
000095533 593__ $$aMechanics of Materials$$c2019$$dQ1
000095533 593__ $$aChemistry (miscellaneous)$$c2019$$dQ1
000095533 593__ $$aElectrical and Electronic Engineering$$c2019$$dQ1
000095533 593__ $$aMechanical Engineering$$c2019$$dQ1
000095533 593__ $$aNanoscience and Nanotechnology$$c2019$$dQ2
000095533 593__ $$aBioengineering$$c2019$$dQ2
000095533 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000095533 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, Soraya$$uUniversidad de Zaragoza
000095533 700__ $$0(orcid)0000-0002-6761-6171$$aMagén, César$$uUniversidad de Zaragoza
000095533 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000095533 7102_ $$15001$$2065$$aUniversidad de Zaragoza$$bDpto. Ciencia Tecnol.Mater.Fl.$$cÁrea Cienc.Mater. Ingen.Metal.
000095533 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000095533 773__ $$g30, 50 (2019), 505302 [10 pp.]$$pNanotechnology$$tNanotechnology$$x0957-4484
000095533 8564_ $$s8111065$$uhttps://zaguan.unizar.es/record/95533/files/texto_completo.pdf$$yPostprint
000095533 8564_ $$s224228$$uhttps://zaguan.unizar.es/record/95533/files/texto_completo.jpg?subformat=icon$$xicon$$yPostprint
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000095533 951__ $$a2020-09-30-10:01:14
000095533 980__ $$aARTICLE