95533 20200930113515.0 doi 10.1088/1361-6528/ab423c sideral 114527 ART-2019-114527 eng (orcid)0000-0001-6771-6941 Pablo-Navarro, Javier Universidad de Zaragoza Diameter modulation of 3D nanostructures in focused electron beam induced deposition using local electric fields and beam defocus 2019 Access copy available to the general public Unrestricted Focused electron beam induced deposition (FEBID) is a leading nanolithography technique in terms of resolution and the capability for three-dimensional (3D) growth of functional nanostructures. However, FEBID still presents some limitations with respect to the precise control of the dimensions of the grown nano-objects as well as its use on insulating substrates. In the present work, we overcome both limitations by employing electrically-biased metal structures patterned on the surface of insulating substrates. Such patterned metal structures serve for charge dissipation and also allow the application of spatially-dependent electric fields. We demonstrate that such electric fields can dramatically change the dimensions of the growing 3D nanostructures by acting on the primary electron beam and the generated secondary electrons. In the performed experiments, the diameter of Pt-C and W-C vertical nanowires grown on quartz, MgO and amorphous SiO2 is tuned by application of moderate voltages (up to 200 V) on the patterned metal microstructures during growth, achieving diameters as small as 50 nm. We identify two competing effects arising from the generated electric fields: a slight change in the primary beam focus point and a strong action on the secondary electrons. Beam defocus is exploited to achieve the in situ modulation of the diameter of 3D FEBID structures during growth. info:eu-repo/grantAgreement/ES/DGA/E13-17R info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R info:eu-repo/semantics/openAccess by-nc-nd http://creativecommons.org/licenses/by-nc-nd/3.0/es/ 3.551 2019 MATERIALS SCIENCE, MULTIDISCIPLINARY 109 / 314 = 0.347 2019 Q2 T2 NANOSCIENCE & NANOTECHNOLOGY 51 / 103 = 0.495 2019 Q2 T2 PHYSICS, APPLIED 40 / 154 = 0.26 2019 Q2 T1 1.026 2019 Materials Science (miscellaneous) 2019 Q1 Mechanics of Materials 2019 Q1 Chemistry (miscellaneous) 2019 Q1 Electrical and Electronic Engineering 2019 Q1 Mechanical Engineering 2019 Q1 Nanoscience and Nanotechnology 2019 Q2 Bioengineering 2019 Q2 info:eu-repo/semantics/article info:eu-repo/semantics/acceptedVersion (orcid)0000-0002-4123-487X Sangiao, Soraya Universidad de Zaragoza (orcid)0000-0002-6761-6171 Magén, César Universidad de Zaragoza (orcid)0000-0001-9566-0738 De Teresa, José María Universidad de Zaragoza 5001 065 Universidad de Zaragoza Dpto. Ciencia Tecnol.Mater.Fl. Área Cienc.Mater. Ingen.Metal. 2003 395 Universidad de Zaragoza Dpto. Física Materia Condensa. Área Física Materia Condensada 30, 50 (2019), 505302 [10 pp.] Nanotechnology Nanotechnology 0957-4484 8111065 http://zaguan.unizar.es/record/95533/files/texto_completo.pdf Postprint 224228 http://zaguan.unizar.es/record/95533/files/texto_completo.jpg?subformat=icon icon Postprint oai:zaguan.unizar.es:95533 articulos driver 2020-09-30-10:01:14 ARTICLE