000096126 001__ 96126
000096126 005__ 20210902121859.0
000096126 0247_ $$2doi$$a10.3390/nano10101906
000096126 0248_ $$2sideral$$a120706
000096126 037__ $$aART-2020-120706
000096126 041__ $$aeng
000096126 100__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche, A.$$uUniversidad de Zaragoza
000096126 245__ $$aOptimization of pt-c deposits by cryo-fibid: Substantial growth rate increase and quasi-metallic behaviour
000096126 260__ $$c2020
000096126 5060_ $$aAccess copy available to the general public$$fUnrestricted
000096126 5203_ $$aThe Focused Ion Beam Induced Deposition (FIBID) under cryogenic conditions (Cryo-FIBID) technique is based on obtaining a condensed layer of precursor molecules by cooling the substrate below the condensation temperature of the gaseous precursor material. This condensed layer is irradiated with ions according to a desired pattern and, subsequently, the substrate is heated above the precursor condensation temperature, revealing the deposits with the shape of the exposed pattern. In this contribution, the fast growth of Pt-C deposits by Cryo-FIBID is demonstrated. Here, we optimize various parameters of the process in order to obtain deposits with the lowest-possible electrical resistivity. Optimized ~30 nm-thick Pt-C deposits are obtained using ion irradiation area dose of 120 µC/cm2 at 30 kV. This finding represents a substantial increment in the growth rate when it is compared with deposits of the same thickness fabricated by standard FIBID at room temperature (40 times enhancement). The value of the electrical resistivity in optimized deposits (~4 × 104 µO cm) is suitable to perform electrical contacts to certain materials. As a proof of concept of the potential applications of this technology, a 100 µm × 100 µm pattern is carried out in only 43 s of ion exposure (area dose of 23 µC/cm2), to be compared with 2.5 h if grown by standard FIBID at room temperature. The ion trajectories and the deposit composition have been simulated using a binary-collision-approximation Monte Carlo code, providing a solid basis for the understanding of the experimental results.
000096126 536__ $$9info:eu-repo/grantAgreement/ES/DGA/E13-20R$$9info:eu-repo/grantAgreement/ES/DGA/E31-20R$$9info:eu-repo/grantAgreement/ES/DGA-FEDER/Construyendo Europa desde Aragón$$9info:eu-repo/grantAgreement/ES/DGA/LMP33-18$$9info:eu-repo/grantAgreement/ES/MINECO-FEDER/PID2019-105881RB-I00$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2016-78257-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T
000096126 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000096126 590__ $$a5.076$$b2020
000096126 591__ $$aPHYSICS, APPLIED$$b35 / 160 = 0.219$$c2020$$dQ1$$eT1
000096126 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b51 / 106 = 0.481$$c2020$$dQ2$$eT2
000096126 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b55 / 178 = 0.309$$c2020$$dQ2$$eT1
000096126 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b103 / 333 = 0.309$$c2020$$dQ2$$eT1
000096126 592__ $$a0.919$$b2020
000096126 593__ $$aMaterials Science (miscellaneous)$$c2020$$dQ1
000096126 593__ $$aChemical Engineering (miscellaneous)$$c2020$$dQ1
000096126 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000096126 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, S.$$uUniversidad de Zaragoza
000096126 700__ $$aPhilipp, P.
000096126 700__ $$0(orcid)0000-0002-4729-9578$$aCea, P.$$uUniversidad de Zaragoza
000096126 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, J.M.$$uUniversidad de Zaragoza
000096126 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física
000096126 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000096126 773__ $$g10, 10 (2020), 1906 [14 pp]$$pNanomaterials (Basel)$$tNanomaterials$$x2079-4991
000096126 8564_ $$s731184$$uhttps://zaguan.unizar.es/record/96126/files/texto_completo.pdf$$yVersión publicada
000096126 8564_ $$s473129$$uhttps://zaguan.unizar.es/record/96126/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000096126 909CO $$ooai:zaguan.unizar.es:96126$$particulos$$pdriver
000096126 951__ $$a2021-09-02-10:34:13
000096126 980__ $$aARTICLE