@article{RodríguezCastro:9991,
author = "Rodríguez Castro, Leidys Marleyn and Pina Iritia, María
Pilar and Urbiztondo Castro, Miguel Ángel",
title = "{Micropatterned substrate modified with hydrophic coating
for dewatering applications}",
year = "2013",
note = "This Master's Thesis is part of a line of research that
aims to develop microsystems with layers / coatings zeolite
as a differentiator. For this purpose it is necessary to
integrate synthesis and the growth stage of polycrystalline
layers in the classic schemes zeolite microfabrication.
More specifically, this paper proposes micro-traps / /
micro-water pre-concentrators for gas streams. These
devices are particularly important in systems where the
chemical analysis of the gas sample conditioning improves
quantification / detection. To that end, two routes have
been proposed study, both on hydrophilic microporous
materials, which differ in the nature of the support
microstructured silicon, and photoresin SU8. On the one
hand is to study the synthesis and characterization of
polycrystalline layers of hydrophilic zeolites A (LTA
structure) wafer scale thin layer of SiO three inches in
diameter. Therefore it will be necessary to optimize
processes prior to planting second growth stage and
subsequent removal of the structuring agent to obtain
homogeneous coatings with good adhesion to a support with
dimensions typically used in current processes cleanroom .
Using techniques of structural and morphological (SEM-EDX,
XRD) define the most appropriate synthesis conditions for
each zeolite structure. In parallel, we will define the
designs of the masks (aspect ratio: length of channel /
channel characteristic dimension variable) for etching the
surface of the microstructures on Si wafers. The
microstructured Si substrates are subjected to optimized
processes with secondary growth to get an even coating and
a suitable adsorbent loading the application sought.",
}