000108378 001__ 108378 000108378 005__ 20230519145428.0 000108378 0247_ $$2doi$$a10.1039/d1na00580d 000108378 0248_ $$2sideral$$a124952 000108378 037__ $$aART-2021-124952 000108378 041__ $$aeng 000108378 100__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche A. 000108378 245__ $$aHighly-efficient growth of cobalt nanostructures using focused ion beam induced deposition under cryogenic conditions: Application to electrical contacts on graphene, magnetism and hard masking 000108378 260__ $$c2021 000108378 5060_ $$aAccess copy available to the general public$$fUnrestricted 000108378 5203_ $$aEmergent technologies are required in the field of nanoelectronics for improved contacts and interconnects at nano and micro-scale. In this work, we report a highly-efficient nanolithography process for the growth of cobalt nanostructures requiring an ultra-low charge dose (15 µC cm-2, unprecedented in single-step charge-based nanopatterning). This resist-free process consists in the condensation of a ~28 nm-thick Co2(CO)8 layer on a substrate held at -100 °C, its irradiation with a Ga+ focused ion beam, and substrate heating up to room temperature. The resulting cobalt-based deposits exhibit sub-100 nm lateral resolution, display metallic behaviour (room-temperature resistivity of 200 µO cm), present ferromagnetic properties (magnetization at room temperature of 400 emu cm-3) and can be grown in large areas. To put these results in perspective, similar properties can be achieved by room-temperature focused ion beam induced deposition and the same precursor only if a 2 × 103 times higher charge dose is used. We demonstrate the application of such an ultra-fast growth process to directly create electrical contacts onto graphene ribbons, opening the route for a broad application of this technology to any 2D material. In addition, the application of these cryo-deposits for hard masking is demonstrated, confirming its structural functionality. This journal is © The Royal Society of Chemistry. 000108378 536__ $$9info:eu-repo/grantAgreement/EUR/COST/CA19140 FIT4NANO$$9info:eu-repo/grantAgreement/ES/CSIC/PIE-202060E187$$9info:eu-repo/grantAgreement/ES/CSIC/PTI-001$$9info:eu-repo/grantAgreement/ES/DGA/E31-20R$$9info:eu-repo/grantAgreement/ES/MCIU/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MCIU/PID2019-105881RB-I00$$9info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T 000108378 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/ 000108378 590__ $$a5.598$$b2021 000108378 592__ $$a1.043$$b2021 000108378 594__ $$a5.7$$b2021 000108378 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b56 / 180 = 0.311$$c2021$$dQ2$$eT1 000108378 593__ $$aAtomic and Molecular Physics, and Optics$$c2021$$dQ1 000108378 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b111 / 345 = 0.322$$c2021$$dQ2$$eT1 000108378 593__ $$aMaterials Science (miscellaneous)$$c2021$$dQ1 000108378 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b55 / 109 = 0.505$$c2021$$dQ3$$eT2 000108378 593__ $$aEngineering (miscellaneous)$$c2021$$dQ1 000108378 593__ $$aBioengineering$$c2021$$dQ1 000108378 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000108378 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao S.$$uUniversidad de Zaragoza 000108378 700__ $$0(orcid)0000-0002-6761-6171$$aMagén C.$$uUniversidad de Zaragoza 000108378 700__ $$aBarrado M. 000108378 700__ $$aPhilipp P. 000108378 700__ $$aBelotcerkovtceva D. 000108378 700__ $$aKamalakar M.V. 000108378 700__ $$0(orcid)0000-0002-4729-9578$$aCea P.$$uUniversidad de Zaragoza 000108378 700__ $$0(orcid)0000-0001-9566-0738$$aTeresa J.M. de$$uUniversidad de Zaragoza 000108378 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física 000108378 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada 000108378 773__ $$g3, 19 (2021), 5656-5662$$tNanoscale Advances$$x2516-0230 000108378 8564_ $$s752340$$uhttps://zaguan.unizar.es/record/108378/files/texto_completo.pdf$$yVersión publicada 000108378 8564_ $$s2763342$$uhttps://zaguan.unizar.es/record/108378/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000108378 909CO $$ooai:zaguan.unizar.es:108378$$particulos$$pdriver 000108378 951__ $$a2023-05-18-14:15:52 000108378 980__ $$aARTICLE