Lightweight thermal compensation technique for MEMS capacitive accelerometer oriented to quasi-static measurements

Martínez, Javier ; Asiain, David ; Beltrán, José Ramón (Universidad de Zaragoza)

Resumen: The application of MEMS capacitive accelerometers is limited by its thermal dependence, and each accelerometer must be individually calibrated to improve its performance. In this work, a light calibration method based on theoretical studies is proposed to obtain two characteristic parameters of the sensor’s operation: the temperature drift of bias and the temperature drift of scale factor. This method requires less data to obtain the characteristic parameters, allowing a faster calibration. Furthermore, using an equation with fewer parameters reduces the computational cost of compensation. After studying six accelerometers, model LIS3DSH, their characteristic parameters are obtained in a temperature range between 15 °C and 55 °C. It is observed that the Temperature Drift of Bias (TDB) is the parameter with the greatest influence on thermal drift, reaching 1.3 mg/°C. The Temperature Drift of Scale Factor (TDSF) is always negative and ranges between 0 and −400 ppm/°C. With these parameters, the thermal drifts are compensated in tests with 20 °C of thermal variation. An average improvement of 47% was observed. In the axes where the thermal drift was greater than 1 mg/°C, the improvement was greater than 80%. Other sensor behaviors have also been analyzed, such as temporal drift (up to 1 mg/h for three hours) and self-heating (2–3 °C in the first hours with the corresponding drift). Thermal compensation has been found to reduce the effect of the latter in the first hours after power-up of the sensor by 43%.

Idioma: Inglés

DOI: 10.3390/s21093117

Año: 2021

Publicado en: Sensors 21, 9 (2021), 3117 [23 pp.]
ISSN: 1424-8220

Factor impacto JCR: 3.847 (2021)

Categ. JCR: CHEMISTRY, ANALYTICAL rank: 29 / 87 = 0.333 (2021) - Q2 - T2
Categ. JCR: INSTRUMENTS & INSTRUMENTATION rank: 19 / 64 = 0.297 (2021) - Q2 - T1
Categ. JCR: ENGINEERING, ELECTRICAL & ELECTRONIC rank: 95 / 277 = 0.343 (2021) - Q2 - T2

Factor impacto CITESCORE: 6.4 - Engineering (Q1) - Physics and Astronomy (Q1) - Biochemistry, Genetics and Molecular Biology (Q2)

Factor impacto SCIMAGO: 0.803 - Analytical Chemistry (Q1) - Biochemistry (Q1) - Instrumentation (Q1) - Information Systems (Q1) - Electrical and Electronic Engineering (Q1)

Tipo y forma: Article (Published version)

Área (Departamento): Área Tecnología Electrónica (Dpto. Ingeniería Electrón.Com.)