000110769 001__ 110769 000110769 005__ 20220223124039.0 000110769 0247_ $$2doi$$a10.1109/DTIP.2016.7514895 000110769 0248_ $$2sideral$$a125584 000110769 037__ $$aART-2016-125584 000110769 041__ $$aeng 000110769 100__ $$aBerenschot, J.W. 000110769 245__ $$a3D-Fractal engineering based on oxide-only corner lithography 000110769 260__ $$c2016 000110769 5060_ $$aAccess copy available to the general public$$fUnrestricted 000110769 5203_ $$aThis paper reports a new highly simplified machining process for three dimensional (3D)-fractal nanofabrication based on oxide-only corner lithography. It consists of a repeated sequence of wet etching (silicon), thermal oxidation and wet etching (silicon oxide). The previously reported 3D-fractal fabrication process needed additional low pressure chemical vapor deposition (LPCVD) steps of silicon nitride, as well as local oxidation of silicon (LOCOS). Employing this new procedure, a three generation folded silicon oxide fractal sheet with approx. a 10 µm footprint has been fabricated. 000110769 540__ $$9info:eu-repo/semantics/openAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/ 000110769 655_4 $$ainfo:eu-repo/semantics/conferenceObject$$vinfo:eu-repo/semantics/publishedVersion 000110769 700__ $$aTiggelaar, R. M. 000110769 700__ $$aGeerlings, J. 000110769 700__ $$aGardeniers, J.G.E. 000110769 700__ $$aTas, N.R. 000110769 700__ $$0(orcid)0000-0001-9595-0831$$aMalankowska, M.$$uUniversidad de Zaragoza 000110769 700__ $$0(orcid)0000-0001-9897-6527$$aPina, M.P.$$uUniversidad de Zaragoza 000110769 700__ $$0(orcid)0000-0002-4758-9380$$aMallada, R.$$uUniversidad de Zaragoza 000110769 7102_ $$15005$$2555$$aUniversidad de Zaragoza$$bDpto. Ing.Quím.Tecnol.Med.Amb.$$cÁrea Ingeniería Química 000110769 773__ $$g(2016), [4 pp.]$$pSymp. Des. Test Integr. Packag. MEMS/MOEMS$$tSymposium on Design, Test, Integration & Packaging of MEMS/MOEMS$$x2768-1874 000110769 8564_ $$s2783349$$uhttps://zaguan.unizar.es/record/110769/files/texto_completo.pdf$$yVersión publicada 000110769 8564_ $$s2724961$$uhttps://zaguan.unizar.es/record/110769/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000110769 909CO $$ooai:zaguan.unizar.es:110769$$particulos$$pdriver 000110769 951__ $$a2022-02-23-11:08:36 000110769 980__ $$aARTICLE