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@article{Berenschot:110769, author = "Berenschot, J.W. and Tiggelaar, R. M. and Geerlings, J. and Gardeniers, J.G.E. and Tas, N.R. and Malankowska, M. and Pina, M.P. and Mallada, R.", title = "{3D-Fractal engineering based on oxide-only corner lithography}", year = "2016", }