High-Throughput Direct Writing of Metallic Micro- and Nano-Structures by Focused Ga+Beam Irradiation of Palladium Acetate Films; 35671475

Salvador-Porroche, Alba (Universidad de Zaragoza) ; Herrer, Lucía ; Sangiao, Soraya (Universidad de Zaragoza) ; Philipp, Patrick ; Cea, Pilar (Universidad de Zaragoza) ; De Teresa, José María (Universidad de Zaragoza)

Resumen: Metallic nanopatterns are ubiquitous in applications that exploit the electrical conduction at the nanoscale, including interconnects, electrical nanocontacts, and small gaps between metallic pads. These metallic nanopatterns can be designed to show additional physical properties (optical transparency, plasmonic effects, ferromagnetism, superconductivity, heat evacuation, etc.). For these reasons, an intense search for novel lithography methods using uncomplicated processes represents a key on-going issue in the achievement of metallic nanopatterns with high resolution and high throughput. In this contribution, we introduce a simple methodology for the efficient decomposition of Pd3(OAc)6 spin-coated thin films by means of a focused Ga+ beam, which results in metallic-enriched Pd nanostructures. Remarkably, the usage of a charge dose as low as 30 µC/cm2 is sufficient to fabricate structures with a metallic Pd content above 50% (at.) exhibiting low electrical resistivity (70 µ¿·cm). Binary-collision-approximation simulations provide theoretical support to this experimental finding. Such notable behavior is used to provide three proof-of-concept applications: (i) creation of electrical contacts to nanowires, (ii) fabrication of small (40 nm) gaps between large metallic contact pads, and (iii) fabrication of large-area metallic meshes. The impact across several fields of the direct decomposition of spin-coated organometallic films by focused ion beams is discussed. © 2022 The Authors. Published by American Chemical Society.

Idioma: Inglés

DOI: 10.1021/acsami.2c05218

Año: 2022

Publicado en: ACS applied materials & interfaces 14, 24 (2022), 28211-28220
ISSN: 1944-8244

Factor impacto JCR: 9.5 (2022)

Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 27 / 107 = 0.252 (2022) - Q2 - T1
Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 55 / 343 = 0.16 (2022) - Q1 - T1

Factor impacto CITESCORE: 15.7 - Materials Science (Q1)

Factor impacto SCIMAGO: 2.178 - Materials Science (miscellaneous) (Q1) - Nanoscience and Nanotechnology (Q1) - Medicine (miscellaneous) (Q1)

Financiación: info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R
Financiación: info:eu-repo/grantAgreement/ES/DGA-FSE/E31-20R
Financiación: info:eu-repo/grantAgreement/ES/MICINN-AEI-FEDER/PID2019-105881RB-I00
Financiación: info:eu-repo/grantAgreement/ES/MICINN-FEDER/MAT2017-82970-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MICINN-FEDER/PID2020-112914RB-I00

Tipo y forma: Artículo (Versión definitiva)

Área (Departamento): Área Química Física (Dpto. Química Física)
Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)