000120988 001__ 120988
000120988 005__ 20240319081019.0
000120988 0247_ $$2doi$$a10.1021/acsami.2c05218
000120988 0248_ $$2sideral$$a129953
000120988 037__ $$aART-2022-129953
000120988 041__ $$aeng
000120988 100__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche, Alba$$uUniversidad de Zaragoza
000120988 245__ $$aHigh-Throughput Direct Writing of Metallic Micro- and Nano-Structures by Focused Ga+Beam Irradiation of Palladium Acetate Films; 35671475
000120988 260__ $$c2022
000120988 5060_ $$aAccess copy available to the general public$$fUnrestricted
000120988 5203_ $$aMetallic nanopatterns are ubiquitous in applications that exploit the electrical conduction at the nanoscale, including interconnects, electrical nanocontacts, and small gaps between metallic pads. These metallic nanopatterns can be designed to show additional physical properties (optical transparency, plasmonic effects, ferromagnetism, superconductivity, heat evacuation, etc.). For these reasons, an intense search for novel lithography methods using uncomplicated processes represents a key on-going issue in the achievement of metallic nanopatterns with high resolution and high throughput. In this contribution, we introduce a simple methodology for the efficient decomposition of Pd3(OAc)6 spin-coated thin films by means of a focused Ga+ beam, which results in metallic-enriched Pd nanostructures. Remarkably, the usage of a charge dose as low as 30 µC/cm2 is sufficient to fabricate structures with a metallic Pd content above 50% (at.) exhibiting low electrical resistivity (70 µ¿·cm). Binary-collision-approximation simulations provide theoretical support to this experimental finding. Such notable behavior is used to provide three proof-of-concept applications: (i) creation of electrical contacts to nanowires, (ii) fabrication of small (40 nm) gaps between large metallic contact pads, and (iii) fabrication of large-area metallic meshes. The impact across several fields of the direct decomposition of spin-coated organometallic films by focused ion beams is discussed. © 2022 The Authors. Published by American Chemical Society.
000120988 536__ $$9info:eu-repo/grantAgreement/ES/DGA-FSE/E13-20R$$9info:eu-repo/grantAgreement/ES/DGA-FSE/E31-20R$$9info:eu-repo/grantAgreement/ES/MICINN-AEI-FEDER/PID2019-105881RB-I00$$9info:eu-repo/grantAgreement/ES/MICINN-FEDER/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MICINN-FEDER/PID2020-112914RB-I00
000120988 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000120988 590__ $$a9.5$$b2022
000120988 592__ $$a2.178$$b2022
000120988 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b27 / 107 = 0.252$$c2022$$dQ2$$eT1
000120988 593__ $$aMaterials Science (miscellaneous)$$c2022$$dQ1
000120988 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b55 / 343 = 0.16$$c2022$$dQ1$$eT1
000120988 593__ $$aNanoscience and Nanotechnology$$c2022$$dQ1
000120988 593__ $$aMedicine (miscellaneous)$$c2022$$dQ1
000120988 594__ $$a15.7$$b2022
000120988 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000120988 700__ $$0(orcid)0000-0002-3576-5156$$aHerrer, Lucía
000120988 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, Soraya$$uUniversidad de Zaragoza
000120988 700__ $$aPhilipp, Patrick
000120988 700__ $$0(orcid)0000-0002-4729-9578$$aCea, Pilar$$uUniversidad de Zaragoza
000120988 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María$$uUniversidad de Zaragoza
000120988 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física
000120988 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000120988 773__ $$g14 (2022), 28211-28220$$pACS appl. mater. interfaces$$tACS applied materials & interfaces$$x1944-8244
000120988 8564_ $$s4647982$$uhttps://zaguan.unizar.es/record/120988/files/texto_completo.pdf$$yVersión publicada
000120988 8564_ $$s3170518$$uhttps://zaguan.unizar.es/record/120988/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000120988 909CO $$ooai:zaguan.unizar.es:120988$$particulos$$pdriver
000120988 951__ $$a2024-03-18-16:00:54
000120988 980__ $$aARTICLE