000121156 001__ 121156
000121156 005__ 20240319081013.0
000121156 0247_ $$2doi$$a10.1088/1361-6528/ac47cf
000121156 0248_ $$2sideral$$a128576
000121156 037__ $$aART-2022-128576
000121156 041__ $$aeng
000121156 100__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche, Alba$$uUniversidad de Zaragoza
000121156 245__ $$aLow-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps
000121156 260__ $$c2022
000121156 5060_ $$aAccess copy available to the general public$$fUnrestricted
000121156 5203_ $$aAbstract
The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000 μC·cm-2 results in the lowest resistivity reported to date for PdNDs, namely 145.1 μΩ·cm, which is only one order of magnitude higher than metallic palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps.
000121156 536__ $$9info:eu-repo/grantAgreement/ES/CSIC/PTI-001$$9info:eu-repo/grantAgreement/ES/DGA/E31-20R$$9info:eu-repo/grantAgreement/ES/DGA/LMP33-18$$9info:eu-repo/grantAgreement/ES/MCIU/MAT2017-82970-C2-2-R$$9info:eu-repo/grantAgreement/ES/MCIU/PID2019-105881RB-I00$$9info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T$$9info:eu-repo/grantAgreement/ES/MINECO/RED2018-102833-T
000121156 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
000121156 590__ $$a3.5$$b2022
000121156 592__ $$a0.705$$b2022
000121156 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b170 / 343 = 0.496$$c2022$$dQ2$$eT2
000121156 591__ $$aPHYSICS, APPLIED$$b54 / 160 = 0.338$$c2022$$dQ2$$eT2
000121156 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b67 / 107 = 0.626$$c2022$$dQ3$$eT2
000121156 593__ $$aMechanical Engineering$$c2022$$dQ1
000121156 593__ $$aChemistry (miscellaneous)$$c2022$$dQ2
000121156 593__ $$aElectrical and Electronic Engineering$$c2022$$dQ2
000121156 593__ $$aNanoscience and Nanotechnology$$c2022$$dQ2
000121156 593__ $$aMechanics of Materials$$c2022$$dQ2
000121156 593__ $$aBioengineering$$c2022$$dQ2
000121156 593__ $$aMaterials Science (miscellaneous)$$c2022$$dQ2
000121156 594__ $$a6.7$$b2022
000121156 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000121156 700__ $$0(orcid)0000-0002-3576-5156$$aHerrer, Lucia
000121156 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, Soraya$$uUniversidad de Zaragoza
000121156 700__ $$0(orcid)0000-0001-9566-0738$$ade Teresa, Jose Maria$$uUniversidad de Zaragoza
000121156 700__ $$0(orcid)0000-0002-4729-9578$$aCea, Pilar$$uUniversidad de Zaragoza
000121156 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física
000121156 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000121156 773__ $$g33, 40 (2022), 405302 [10 pp.]$$pNanotechnology$$tNanotechnology$$x0957-4484
000121156 8564_ $$s1281181$$uhttps://zaguan.unizar.es/record/121156/files/texto_completo.pdf$$yPostprint
000121156 8564_ $$s1322639$$uhttps://zaguan.unizar.es/record/121156/files/texto_completo.jpg?subformat=icon$$xicon$$yPostprint
000121156 909CO $$ooai:zaguan.unizar.es:121156$$particulos$$pdriver
000121156 951__ $$a2024-03-18-15:23:45
000121156 980__ $$aARTICLE