Low-resistivity Pd nanopatterns created by a direct electron beam irradiation process free of post-treatment steps

Salvador-Porroche, Alba (Universidad de Zaragoza) ; Herrer, Lucia ; Sangiao, Soraya (Universidad de Zaragoza) ; de Teresa, Jose Maria (Universidad de Zaragoza) ; Cea, Pilar (Universidad de Zaragoza)

Resumen: Abstract
The ability to create metallic patterned nanostructures with excellent control of size, shape and spatial orientation is of utmost importance in the construction of next-generation electronic and optical devices as well as in other applications such as (bio)sensors, reactive surfaces for catalysis, etc. Moreover, development of simple, rapid and low-cost fabrication processes of metallic patterned nanostructures is a challenging issue for the incorporation of such devices in real market applications. In this contribution, a direct-write method that results in highly conducting palladium-based nanopatterned structures without the need of applying subsequent curing processes is presented. Spin-coated films of palladium acetate were irradiated with an electron beam to produce palladium nanodeposits (PdNDs) with controlled size, shape and height. The use of different electron doses was investigated and its influence on the PdNDs features determined, namely: (1) thickness of the deposits, (2) atomic percentage of palladium content, (3) oxidation state of palladium in the deposit, (4) morphology of the sample and grain size of the Pd nanocrystals and (5) resistivity. It has been probed that the use of high electron doses, 30000 μC·cm-2 results in the lowest resistivity reported to date for PdNDs, namely 145.1 μΩ·cm, which is only one order of magnitude higher than metallic palladium. This result paves the way for development of simplified lithography processes of nanostructured deposits avoiding subsequent post-treatment steps.

Idioma: Inglés

DOI: 10.1088/1361-6528/ac47cf

Año: 2022

Publicado en: Nanotechnology 33, 40 (2022), 405302 [10 pp.]
ISSN: 0957-4484

Factor impacto JCR: 3.5 (2022)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 170 / 343 = 0.496 (2022) - Q2 - T2
Categ. JCR: PHYSICS, APPLIED rank: 54 / 160 = 0.338 (2022) - Q2 - T2
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 67 / 107 = 0.626 (2022) - Q3 - T2

Factor impacto CITESCORE: 6.7 - Engineering (Q1) - Chemistry (Q1) - Chemical Engineering (Q2) - Materials Science (Q1)

Factor impacto SCIMAGO: 0.705 - Mechanical Engineering (Q1) - Chemistry (miscellaneous) (Q2) - Electrical and Electronic Engineering (Q2) - Nanoscience and Nanotechnology (Q2) - Mechanics of Materials (Q2) - Bioengineering (Q2) - Materials Science (miscellaneous) (Q2)

Financiación: info:eu-repo/grantAgreement/ES/CSIC/PTI-001
Financiación: info:eu-repo/grantAgreement/ES/DGA/E31-20R
Financiación: info:eu-repo/grantAgreement/ES/DGA/LMP33-18
Financiación: info:eu-repo/grantAgreement/ES/MCIU/MAT2017-82970-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MCIU/PID2019-105881RB-I00
Financiación: info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2018-102627-T
Financiación: info:eu-repo/grantAgreement/ES/MINECO/RED2018-102833-T

Tipo y forma: Artículo (PostPrint)

Área (Departamento): Área Química Física (Dpto. Química Física)
Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)