Ligand size and carbon-chain length study of silver carboxylates in focused electron-beam-induced deposition

Jurczyk, Jakub ; Höflich, Katja ; Madajska, Katarzyna ; Berger, Luisa ; Brockhuis, Leo ; Edwards, Thomas Edward James ; Kapusta, Czeslaw ; Szymanska, Iwona B. ; Utke, Ivo

Resumen: Gas-assisted focused electron-beam-induced deposition is a versatile tool for the direct writing of complex-shaped nanostructures with unprecedented shape fidelity and resolution. While the technique is well-established for various materials, the direct electron beam writing of silver is still in its infancy. Here, we examine and compare five different silver carboxylates, three perfluorinated: [Ag2(µ-O2CCF3)2], [Ag2(µ-O2CC2F5)2], and [Ag2(µ-O2CC3F7)2], and two containing branched substituents: [Ag2(µ-O2CCMe2Et)2] and [Ag2(µ-O2CtBu)2], as potential precursors for focused electron-beam-induced deposition. All of the compounds show high sensitivity to electron dissociation and efficient dissociation of Ag-O bonds. The as-deposited materials have silver contents from 42 at.% to above 70 at.% and are composed of silver nano-crystals with impurities of carbon and fluorine between them. Precursors with the shortest carbon-fluorine chain ligands yield the highest silver contents. In addition, the deposited silver content depends on the balance of electron-induced ligand co-deposition and ligand desorption. For all of the tested compounds, low electron flux was related to high silver content. Our findings demonstrate that silver carboxylates constitute a promising group of precursors for gas-assisted focused electron beam writing of high silver content materials.

Idioma: Inglés

DOI: 10.3390/nano13091516

Año: 2023

Publicado en: Nanomaterials 13, 9 (2023), 1516 [14 pp.]
ISSN: 2079-4991

Factor impacto JCR: 4.4 (2023)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 146 / 439 = 0.333 (2023) - Q2 - T2
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 62 / 141 = 0.44 (2023) - Q2 - T2
Categ. JCR: CHEMISTRY, MULTIDISCIPLINARY rank: 70 / 231 = 0.303 (2023) - Q2 - T1
Categ. JCR: PHYSICS, APPLIED rank: 47 / 179 = 0.263 (2023) - Q2 - T1

Factor impacto CITESCORE: 8.5 - Chemical Engineering (all) (Q1) - Materials Science (all) (Q1)

Factor impacto SCIMAGO: 0.798 - Chemical Engineering (miscellaneous) (Q1) - Materials Science (miscellaneous) (Q2)

Financiación: info:eu-repo/grantAgreement/EC/H2020/722149/EU/Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods/ELENA

Tipo y forma: Article (Published version)