| Página principal > Artículos > Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion > MARC |
000132795 001__ 132795 000132795 005__ 20250923084413.0 000132795 0247_ $$2doi$$a10.1021/acs.jpcc.3c08250 000132795 0248_ $$2sideral$$a137675 000132795 037__ $$aART-2024-137675 000132795 041__ $$aeng 000132795 100__ $$aJungwirth, Felix 000132795 245__ $$aGas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion 000132795 260__ $$c2024 000132795 5060_ $$aAccess copy available to the general public$$fUnrestricted 000132795 5203_ $$aThe investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are illustrated for focused-ion-beam- and focused-electron-beam-induced deposition (FIBID/FEBID) and compared to the thermal decomposition in chemical vapor deposition (CVD). This article reports on specific differences in the deposit composition and microstructure when the (H3Si)2Fe(CO)4 precursor is converted into an inorganic material. Maximum metal/metalloid contents of up to 90 at. % are obtained in FIBID deposits and higher than 90 at. % in CVD films, while FEBID with the same precursor provides material containing less than 45 at. % total metal/metalloid content. Moreover, the Fe:Si ratio is retained well in FEBID and CVD processes, but FIBID using Ga+ ions liberates more than 50% of the initial Si provided by the precursor. This suggests that precursors for FIBID processes targeting binary materials should include multiple bonding such as bridging positions for nonmetals. In addition, an in situ method for investigations of supporting thermal effects of precursor fragmentation during the direct-writing processes is presented, and the applicability of the precursor for nanoscale 3D FEBID writing is demonstrated. 000132795 536__ $$9info:eu-repo/grantAgreement/ES/DGA/E13-23R$$9info:eu-repo/grantAgreement/ES/DGA/E31-23R$$9info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00$$9info:eu-repo/grantAgreement/ES/MICINN/PID2019-105881RB-I00$$9info:eu-repo/grantAgreement/EUR/MICINN/TED2021-131318B-I00 000132795 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/ 000132795 590__ $$a3.2$$b2024 000132795 592__ $$a0.914$$b2024 000132795 591__ $$aCHEMISTRY, PHYSICAL$$b95 / 185 = 0.514$$c2024$$dQ3$$eT2 000132795 593__ $$aPhysical and Theoretical Chemistry$$c2024$$dQ1 000132795 591__ $$aNANOSCIENCE & NANOTECHNOLOGY$$b88 / 147 = 0.599$$c2024$$dQ3$$eT2 000132795 593__ $$aElectronic, Optical and Magnetic Materials$$c2024$$dQ1 000132795 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b237 / 460 = 0.515$$c2024$$dQ3$$eT2 000132795 593__ $$aSurfaces, Coatings and Films$$c2024$$dQ1 000132795 593__ $$aEnergy (miscellaneous)$$c2024$$dQ2 000132795 593__ $$aNanoscience and Nanotechnology$$c2024$$dQ2 000132795 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion 000132795 700__ $$0(orcid)0000-0003-2517-9468$$aSalvador-Porroche, Alba 000132795 700__ $$aPorrati, Fabrizio 000132795 700__ $$aJochmann, Nicolas P. 000132795 700__ $$aKnez, Daniel 000132795 700__ $$aHuth, Michael 000132795 700__ $$aGracia, Isabel 000132795 700__ $$aCané, Carles 000132795 700__ $$0(orcid)0000-0002-4729-9578$$aCea, Pilar$$uUniversidad de Zaragoza 000132795 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, José María 000132795 700__ $$aBarth, Sven 000132795 7102_ $$12012$$2755$$aUniversidad de Zaragoza$$bDpto. Química Física$$cÁrea Química Física 000132795 773__ $$g128, 7 (2024), 2967-2977$$pJ. phys. chem., C$$tJournal of physical chemistry. C.$$x1932-7447 000132795 8564_ $$s5711524$$uhttps://zaguan.unizar.es/record/132795/files/texto_completo.pdf$$yVersión publicada 000132795 8564_ $$s3172981$$uhttps://zaguan.unizar.es/record/132795/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada 000132795 909CO $$ooai:zaguan.unizar.es:132795$$particulos$$pdriver 000132795 951__ $$a2025-09-22-14:31:08 000132795 980__ $$aARTICLE
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