Página principal > Artículos > AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection > BibTeX |
@article{Villarroya:61476, author = "Villarroya, M. and Pérez-Murano, F. and Martín, C. and Davis, Z. and Boisen, A. and Esteve, J. and Figueras, E. and Montserrat, J. and Barniol, N.", title = "{AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection}", year = "2004", }