| Accueil > articulos > AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection > BibTeX |
@article{Villarroya:61476,
author = "Villarroya, M. and Pérez-Murano, F. and Martín, C. and
Davis, Z. and Boisen, A. and Esteve, J. and Figueras, E.
and Montserrat, J. and Barniol, N.",
title = "{AFM lithography for the definition of nanometre scale
gaps: Application to the fabrication of a cantilever-based
sensor with electrochemical current detection}",
year = "2004",
}