Resumen: We report the enthalpy of oxygen vacancy formation in thin films of electron-doped SrTiO3, under different degrees of epitaxial stress. We demonstrate that both compressive and tensile strain decrease this energy at a very similar rate and promote the formation of stable doubly ionized oxygen vacancies. Moreover, we also show that unintentional cationic vacancies introduced under typical growth conditions, produce a characteristic rotation pattern of TiO6 octahedra. The local concentration of oxygen vacancies can be modulated by an electric field with an AFM tip, changing not only the local electrical potential but also producing a nonvolatile mechanical response whose sign (up/down) can be reversed by the electric field. Idioma: Inglés DOI: 10.1103/PhysRevB.95.165138 Año: 2017 Publicado en: Physical Review B. Condensed Matter and Materials Physics 95, 16 (2017), 165138 [7 pp] ISSN: 1098-0121 Factor impacto SCIMAGO: 1.604 - Electronic, Optical and Magnetic Materials (Q1) - Condensed Matter Physics (Q1)