000078259 001__ 78259
000078259 005__ 20200117211558.0
000078259 0247_ $$2doi$$a10.1016/j.carbon.2017.12.033
000078259 0248_ $$2sideral$$a104127
000078259 037__ $$aART-2018-104127
000078259 041__ $$aeng
000078259 100__ $$aDago, A.I.
000078259 245__ $$aChemical and structural analysis of sub-20 nm graphene patterns generated by scanning probe lithography
000078259 260__ $$c2018
000078259 5060_ $$aAccess copy available to the general public$$fUnrestricted
000078259 5203_ $$aSub-20 nm patterns have been fabricated by using oxidation scanning probe lithography on epitaxial graphene. The structural and chemical properties of these nanopatterns have been characterized by high resolution transmission electron microscopy, energy dispersive X-ray spectroscopy and electron energy loss spectroscopy. The electron microscopy images reveal that the nanolithography process modifies the graphene monolayer and a thin region of the SiC substrate (1 nm thick). Spatially-resolved electron spectroscopies show that the nanopatterns are made of graphene oxide. The combination of spatially-resolved structural and chemical analysis of graphene nanopatterns will enable the development of high-performance graphene devices.
000078259 536__ $$9info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-2-R$$9info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-1-R$$9info:eu-repo/grantAgreement/ES/MINECO-FEDER/MAT2016-76507-R$$9info:eu-repo/grantAgreement/EC/FP7/318804/EU/Single Nanometer Manufacturing for beyond CMOS devices/SNM
000078259 540__ $$9info:eu-repo/semantics/openAccess$$aAll rights reserved$$uhttp://www.europeana.eu/rights/rr-f/
000078259 590__ $$a7.466$$b2018
000078259 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b33 / 293 = 0.113$$c2018$$dQ1$$eT1
000078259 591__ $$aCHEMISTRY, PHYSICAL$$b27 / 148 = 0.182$$c2018$$dQ1$$eT1
000078259 592__ $$a2.116$$b2018
000078259 593__ $$aMaterials Science (miscellaneous)$$c2018$$dQ1
000078259 593__ $$aChemistry (miscellaneous)$$c2018$$dQ1
000078259 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/acceptedVersion
000078259 700__ $$0(orcid)0000-0002-4123-487X$$aSangiao, S.$$uUniversidad de Zaragoza
000078259 700__ $$0(orcid)0000-0002-6813-780X$$aFernández-Pacheco, R.$$uUniversidad de Zaragoza
000078259 700__ $$0(orcid)0000-0001-9566-0738$$aDe Teresa, J.M.$$uUniversidad de Zaragoza
000078259 700__ $$aGarcia, R.
000078259 7102_ $$12003$$2395$$aUniversidad de Zaragoza$$bDpto. Física Materia Condensa.$$cÁrea Física Materia Condensada
000078259 773__ $$g129 (2018), 281-285$$pCarbon$$tCarbon$$x0008-6223
000078259 8564_ $$s670544$$uhttps://zaguan.unizar.es/record/78259/files/texto_completo.pdf$$yPostprint
000078259 8564_ $$s60414$$uhttps://zaguan.unizar.es/record/78259/files/texto_completo.jpg?subformat=icon$$xicon$$yPostprint
000078259 909CO $$ooai:zaguan.unizar.es:78259$$particulos$$pdriver
000078259 951__ $$a2020-01-17-21:10:01
000078259 980__ $$aARTICLE