Chemical and structural analysis of sub-20 nm graphene patterns generated by scanning probe lithography

Dago, A.I. ; Sangiao, S. (Universidad de Zaragoza) ; Fernández-Pacheco, R. (Universidad de Zaragoza) ; De Teresa, J.M. (Universidad de Zaragoza) ; Garcia, R.

Resumen: Sub-20 nm patterns have been fabricated by using oxidation scanning probe lithography on epitaxial graphene. The structural and chemical properties of these nanopatterns have been characterized by high resolution transmission electron microscopy, energy dispersive X-ray spectroscopy and electron energy loss spectroscopy. The electron microscopy images reveal that the nanolithography process modifies the graphene monolayer and a thin region of the SiC substrate (1 nm thick). Spatially-resolved electron spectroscopies show that the nanopatterns are made of graphene oxide. The combination of spatially-resolved structural and chemical analysis of graphene nanopatterns will enable the development of high-performance graphene devices.

Idioma: Inglés

DOI: 10.1016/j.carbon.2017.12.033

Año: 2018

Publicado en: Carbon 129 (2018), 281-285
ISSN: 0008-6223

Factor impacto JCR: 7.466 (2018)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 33 / 293 = 0.113 (2018) - Q1 - T1
Categ. JCR: CHEMISTRY, PHYSICAL rank: 27 / 148 = 0.182 (2018) - Q1 - T1

Factor impacto SCIMAGO: 2.116 - Materials Science (miscellaneous) (Q1) - Chemistry (miscellaneous) (Q1)

Financiación: info:eu-repo/grantAgreement/EC/FP7/318804/EU/Single Nanometer Manufacturing for beyond CMOS devices/SNM
Financiación: info:eu-repo/grantAgreement/ES/MINECO-FEDER/MAT2016-76507-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-1-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2014-51982-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT

Tipo y forma: Artículo (PostPrint)

Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)