Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators
Gruber, G. ; Urgell, C. ; Tavernarakis, A. ; Stavrinadis, A.: Tepsic, S. ; Magén, C. (Universidad de Zaragoza) ; Sangiao, S. (Universidad de Zaragoza) ; De Teresa, J.M. (Universidad de Zaragoza) ; Verlot, P. ; Bachtold, A.
Resumen: We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.
Idioma: Inglés
DOI: 10.1021/acs.nanolett.9b02351
Año: 2019
Publicado en: Nano Letters 19, 10 (2019), 6987-6992
ISSN: 1530-6984
Factor impacto JCR: 11.238 (2019)
Categ. JCR: CHEMISTRY, PHYSICAL rank: 18 / 159 = 0.113 (2019) - Q1 - T1
Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 25 / 314 = 0.08 (2019) - Q1 - T1
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 14 / 103 = 0.136 (2019) - Q1 - T1
Categ. JCR: PHYSICS, CONDENSED MATTER rank: 8 / 69 = 0.116 (2019) - Q1 - T1
Categ. JCR: CHEMISTRY, MULTIDISCIPLINARY rank: 19 / 177 = 0.107 (2019) - Q1 - T1
Categ. JCR: PHYSICS, APPLIED rank: 11 / 154 = 0.071 (2019) - Q1 - T1
Factor impacto SCIMAGO: 5.786 - Bioengineering (Q1) - Chemistry (miscellaneous) (Q1) - Nanoscience and Nanotechnology (Q1) - Materials Science (miscellaneous) (Q1) - Mechanical Engineering (Q1) - Condensed Matter Physics (Q1)
Financiación: info:eu-repo/grantAgreement/ES/DGA/E13-17R
Financiación: info:eu-repo/grantAgreement/EC/H2020/692876/EU/Nanotube Mechanical Resonator, Spin, and Superfluidity/NaTuRe
Financiación: info:eu-repo/grantAgreement/EC/H2020/758794/EU/Quantum optomechanics at ROOm Temperature/Q-ROOT
Financiación: info:eu-repo/grantAgreement/EC/H2020/862149/EU/Room Temperature Magnetic Resonance Force Microscopy/RTMFRM
Financiación: info:eu-repo/grantAgreement/ES/MINECO/FIS2015-69831-P
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/RTI2018-097953-B-I00
Financiación: info:eu-repo/grantAgreement/ES/MINECO/SEV-2015-0522
Tipo y forma: Article (Published version)
Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)
You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use. You may not use the material for commercial purposes.
Exportado de SIDERAL (2021-01-04-11:06:30)
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Idioma: Inglés
DOI: 10.1021/acs.nanolett.9b02351
Año: 2019
Publicado en: Nano Letters 19, 10 (2019), 6987-6992
ISSN: 1530-6984
Factor impacto JCR: 11.238 (2019)
Categ. JCR: CHEMISTRY, PHYSICAL rank: 18 / 159 = 0.113 (2019) - Q1 - T1
Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 25 / 314 = 0.08 (2019) - Q1 - T1
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 14 / 103 = 0.136 (2019) - Q1 - T1
Categ. JCR: PHYSICS, CONDENSED MATTER rank: 8 / 69 = 0.116 (2019) - Q1 - T1
Categ. JCR: CHEMISTRY, MULTIDISCIPLINARY rank: 19 / 177 = 0.107 (2019) - Q1 - T1
Categ. JCR: PHYSICS, APPLIED rank: 11 / 154 = 0.071 (2019) - Q1 - T1
Factor impacto SCIMAGO: 5.786 - Bioengineering (Q1) - Chemistry (miscellaneous) (Q1) - Nanoscience and Nanotechnology (Q1) - Materials Science (miscellaneous) (Q1) - Mechanical Engineering (Q1) - Condensed Matter Physics (Q1)
Financiación: info:eu-repo/grantAgreement/ES/DGA/E13-17R
Financiación: info:eu-repo/grantAgreement/EC/H2020/692876/EU/Nanotube Mechanical Resonator, Spin, and Superfluidity/NaTuRe
Financiación: info:eu-repo/grantAgreement/EC/H2020/758794/EU/Quantum optomechanics at ROOm Temperature/Q-ROOT
Financiación: info:eu-repo/grantAgreement/EC/H2020/862149/EU/Room Temperature Magnetic Resonance Force Microscopy/RTMFRM
Financiación: info:eu-repo/grantAgreement/ES/MINECO/FIS2015-69831-P
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/RTI2018-097953-B-I00
Financiación: info:eu-repo/grantAgreement/ES/MINECO/SEV-2015-0522
Tipo y forma: Article (Published version)
Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)
You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use. You may not use the material for commercial purposes. Exportado de SIDERAL (2021-01-04-11:06:30)
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Record created 2019-11-18, last modified 2021-01-04