000087750 001__ 87750
000087750 005__ 20230914083241.0
000087750 0247_ $$2doi$$a10.3390/app9224860
000087750 0248_ $$2sideral$$a115878
000087750 037__ $$aART-2019-115878
000087750 041__ $$aeng
000087750 100__ $$0(orcid)0000-0003-3823-7903$$aDíaz-Pérez, Lucía$$uUniversidad de Zaragoza
000087750 245__ $$a2D positioning control system for the planar motion of a nanopositioning platform
000087750 260__ $$c2019
000087750 5060_ $$aAccess copy available to the general public$$fUnrestricted
000087750 5203_ $$aA novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. For control hardware, this work proposes the use of a commercial generic solution, in contrast to other systems where the control hardware and software are specifically designed for that purpose. In a previous paper based on this research, the control system of one linear motor implemented in selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range.
000087750 536__ $$9info:eu-repo/grantAgreement/ES/MICINN/RTI2018-097191-B-I00$$9info:eu-repo/grantAgreement/ES/DGA/T56-17R
000087750 540__ $$9info:eu-repo/semantics/openAccess$$aby$$uhttp://creativecommons.org/licenses/by/3.0/es/
000087750 590__ $$a2.474$$b2019
000087750 591__ $$aPHYSICS, APPLIED$$b62 / 154 = 0.403$$c2019$$dQ2$$eT2
000087750 591__ $$aENGINEERING, MULTIDISCIPLINARY$$b32 / 91 = 0.352$$c2019$$dQ2$$eT2
000087750 591__ $$aCHEMISTRY, MULTIDISCIPLINARY$$b88 / 176 = 0.5$$c2019$$dQ2$$eT2
000087750 591__ $$aMATERIALS SCIENCE, MULTIDISCIPLINARY$$b161 / 314 = 0.513$$c2019$$dQ3$$eT2
000087750 592__ $$a0.418$$b2019
000087750 593__ $$aEngineering (miscellaneous)$$c2019$$dQ1
000087750 593__ $$aFluid Flow and Transfer Processes$$c2019$$dQ2
000087750 593__ $$aProcess Chemistry and Technology$$c2019$$dQ2
000087750 593__ $$aInstrumentation$$c2019$$dQ2
000087750 593__ $$aMaterials Science (miscellaneous)$$c2019$$dQ2
000087750 593__ $$aComputer Science Applications$$c2019$$dQ3
000087750 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000087750 700__ $$0(orcid)0000-0002-3069-2736$$aTorralba, Marta
000087750 700__ $$0(orcid)0000-0003-4839-0610$$aAlbajez, José Antonio$$uUniversidad de Zaragoza
000087750 700__ $$0(orcid)0000-0001-7152-4117$$aYagüe-Fabra, José Antonio$$uUniversidad de Zaragoza
000087750 7102_ $$15002$$2515$$aUniversidad de Zaragoza$$bDpto. Ingeniería Diseño Fabri.$$cÁrea Ing. Procesos Fabricación
000087750 773__ $$g9, 22 (2019), 4860 [17 pp.]$$pAppl. sci.$$tApplied Sciences (Switzerland)$$x2076-3417
000087750 8564_ $$s3491155$$uhttps://zaguan.unizar.es/record/87750/files/texto_completo.pdf$$yVersión publicada
000087750 8564_ $$s503485$$uhttps://zaguan.unizar.es/record/87750/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000087750 909CO $$ooai:zaguan.unizar.es:87750$$particulos$$pdriver
000087750 951__ $$a2023-09-13-10:48:41
000087750 980__ $$aARTICLE