Positioning uncertainty of the control system for the planar motion of a nanopositioning platform

Díaz-Pérez, Lucía (Universidad de Zaragoza) ; Torralba, Marta ; Albajez, José Antonio (Universidad de Zaragoza) ; Yagüe Fabra, José Antonio (Universidad de Zaragoza)

Resumen: The novel nanopositioning platform (NanoPla) that is in development at the University of Zaragoza has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. The 2D movement is performed by four custom-made Halbach linear motors and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. As control hardware, this work proposes the use of a commercial solution, in contrast to other systems, where the control hardware and software were specifically designed for the purpose. In a previous work of this research, the control system of one linear motor implemented in the selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate a 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range.

Idioma: Inglés

DOI: 10.1016/j.promfg.2019.07.053

Año: 2019

Publicado en: Procedia Manufacturing 41 (2019), 249-256
ISSN: 2351-9789

Factor impacto SCIMAGO: 0.516 - Industrial and Manufacturing Engineering (Q2) - Artificial Intelligence (Q2)

Financiación: info:eu-repo/grantAgreement/ES/DGA/T56-17R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/DPI2015-69403-C3-1-R

Tipo y forma: Artículo (Versión definitiva)

Área (Departamento): Área Ing. Procesos Fabricación (Dpto. Ingeniería Diseño Fabri.)