000094516 001__ 94516
000094516 005__ 20230921135433.0
000094516 0247_ $$2doi$$a10.1016/j.promfg.2019.07.053
000094516 0248_ $$2sideral$$a118482
000094516 037__ $$aART-2019-118482
000094516 041__ $$aeng
000094516 100__ $$0(orcid)0000-0003-3823-7903$$aDíaz-Pérez, Lucía$$uUniversidad de Zaragoza
000094516 245__ $$aPositioning uncertainty of the control system for the planar motion of a nanopositioning platform
000094516 260__ $$c2019
000094516 5060_ $$aAccess copy available to the general public$$fUnrestricted
000094516 5203_ $$aThe novel nanopositioning platform (NanoPla) that is in development at the University of Zaragoza has been designed to achieve nanometre resolution in a large working range of 50 mm × 50 mm. The 2D movement is performed by four custom-made Halbach linear motors and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. As control hardware, this work proposes the use of a commercial solution, in contrast to other systems, where the control hardware and software were specifically designed for the purpose. In a previous work of this research, the control system of one linear motor implemented in the selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate a 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±0.5 µm along the whole working range.
000094516 536__ $$9info:eu-repo/grantAgreement/ES/DGA/T56-17R$$9info:eu-repo/grantAgreement/ES/MINECO/DPI2015-69403-C3-1-R
000094516 540__ $$9info:eu-repo/semantics/openAccess$$aby-nc-nd$$uhttp://creativecommons.org/licenses/by-nc-nd/3.0/es/
000094516 592__ $$a0.516$$b2019
000094516 593__ $$aIndustrial and Manufacturing Engineering$$c2019$$dQ2
000094516 593__ $$aArtificial Intelligence$$c2019$$dQ2
000094516 655_4 $$ainfo:eu-repo/semantics/article$$vinfo:eu-repo/semantics/publishedVersion
000094516 700__ $$0(orcid)0000-0002-3069-2736$$aTorralba, Marta
000094516 700__ $$0(orcid)0000-0003-4839-0610$$aAlbajez, José Antonio$$uUniversidad de Zaragoza
000094516 700__ $$0(orcid)0000-0001-7152-4117$$aYagüe Fabra, José Antonio$$uUniversidad de Zaragoza
000094516 7102_ $$15002$$2515$$aUniversidad de Zaragoza$$bDpto. Ingeniería Diseño Fabri.$$cÁrea Ing. Procesos Fabricación
000094516 773__ $$g41 (2019), 249-256$$tProcedia Manufacturing$$x2351-9789
000094516 8564_ $$s1131262$$uhttps://zaguan.unizar.es/record/94516/files/texto_completo.pdf$$yVersión publicada
000094516 8564_ $$s304118$$uhttps://zaguan.unizar.es/record/94516/files/texto_completo.jpg?subformat=icon$$xicon$$yVersión publicada
000094516 909CO $$ooai:zaguan.unizar.es:94516$$particulos$$pdriver
000094516 951__ $$a2023-09-21-13:30:34
000094516 980__ $$aARTICLE