Influence of boehmite intermediate layer as covalent linker on synthesis of LTA zeolite coatings

Rodríguez-Castro, Leidys Marleyn ; Urbiztondo-Castro, Miguel Angel ; Pina-Iritia, Maria Pilar (Universidad de Zaragoza)

Resumen: The incorporation of nanostructured materials, such as LTA-type zeolite on the silicon wafers, opens a very interesting door to the use of these materials within silicon based microfabrication technologies. This work studies the deposition and intergrowth of defect-free LTA-type zeolite layer onto 3-inch Silicon wafers with a layer of SiO2 subjected to pretreatment. The main disadvantage associated with zeolite layer synthesis are crack the formation of cracks and difficulty of obtaining a uniform layer. By modifying the supports with boehmite, a substantial improvement was observed in terms of layer continuity and crystal intergrowth in comparrison to coatings prepared on cationic polymer, poly (diallyldimethylammonium chloride). An LTA- type zeolite layer was synthesized in a range of 350 to 1300 nm via hydrothermal ex-situ method at 363 K for 12 h. Tetramethylammonium hydroxide (TMAOH) was used as a template, and aluminum isopropoxide and colloidal silica were used as Al and Si sources, respectively.

Idioma: Inglés

DOI: 10.17533/udea.redin.20200693

Año: 2020

Publicado en: Revista Facultad de Ingenieria-Universidad de Antioquia 101 (2020), 64-73
ISSN: 0120-6230

Factor impacto SCIMAGO: 0.16 - Engineering (miscellaneous) (Q4)

Tipo y forma: Article (Published version)

Área (Departamento): Área Ingeniería Química (Dpto. Ing.Quím.Tecnol.Med.Amb.)