Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursor: Comparing Direct-Write Processing and Thermal Conversion

Jungwirth, Felix ; Salvador-Porroche, Alba ; Porrati, Fabrizio ; Jochmann, Nicolas P. ; Knez, Daniel ; Huth, Michael ; Gracia, Isabel ; Cané, Carles ; Cea, Pilar (Universidad de Zaragoza) ; De Teresa, José María ; Barth, Sven

Resumen: The investigation of precursor classes for the fabrication of nanostructures is of specific interest for maskless fabrication and direct nanoprinting. In this study, the differences in material composition depending on the employed process are illustrated for focused-ion-beam- and focused-electron-beam-induced deposition (FIBID/FEBID) and compared to the thermal decomposition in chemical vapor deposition (CVD). This article reports on specific differences in the deposit composition and microstructure when the (H3Si)2Fe(CO)4 precursor is converted into an inorganic material. Maximum metal/metalloid contents of up to 90 at. % are obtained in FIBID deposits and higher than 90 at. % in CVD films, while FEBID with the same precursor provides material containing less than 45 at. % total metal/metalloid content. Moreover, the Fe:Si ratio is retained well in FEBID and CVD processes, but FIBID using Ga+ ions liberates more than 50% of the initial Si provided by the precursor. This suggests that precursors for FIBID processes targeting binary materials should include multiple bonding such as bridging positions for nonmetals. In addition, an in situ method for investigations of supporting thermal effects of precursor fragmentation during the direct-writing processes is presented, and the applicability of the precursor for nanoscale 3D FEBID writing is demonstrated.

Idioma: Inglés

DOI: 10.1021/acs.jpcc.3c08250

Año: 2024

Publicado en: Journal of physical chemistry. C. 128, 7 (2024), 2967-2977
ISSN: 1932-7447

Financiación: info:eu-repo/grantAgreement/ES/DGA/E13-23R
Financiación: info:eu-repo/grantAgreement/ES/DGA/E31-23R
Financiación: info:eu-repo/grantAgreement/ES/MCIU/PID2020-112914RB-I00
Financiación: info:eu-repo/grantAgreement/ES/MICINN/PID2019-105881RB-I00
Financiación: info:eu-repo/grantAgreement/EUR/MICINN/TED2021-131318B-I00

Tipo y forma: Article (Published version)

Área (Departamento): Área Química Física (Dpto. Química Física)