Diameter modulation of 3D nanostructures in focused electron beam induced deposition using local electric fields and beam defocus

Pablo-Navarro, Javier (Universidad de Zaragoza) ; Sangiao, Soraya (Universidad de Zaragoza) ; Magén, César (Universidad de Zaragoza) ; De Teresa, José María (Universidad de Zaragoza)

Resumen: Focused electron beam induced deposition (FEBID) is a leading nanolithography technique in
terms of resolution and the capability for three-dimensional (3D) growth of functional nanostructures. However, FEBID still presents some limitations with respect to the precise control of the dimensions of the grown nano-objects as well as its use on insulating substrates. In the present work, we overcome both limitations by employing electrically-biased metal structures patterned on the surface of insulating substrates. Such patterned metal structures serve for charge dissipation and also allow the application of spatially-dependent electric fields. We demonstrate that such electric fields can dramatically change the dimensions of the growing 3D nanostructures by acting on the primary electron beam and the generated secondary electrons. In the performed experiments, the diameter of Pt-C and W-C vertical nanowires grown on quartz, MgO and amorphous SiO2 is tuned by application of moderate voltages (up to 200 V) on the patterned metal microstructures during growth, achieving diameters as small as 50 nm. We identify two competing effects arising from the generated electric fields: a slight change in the primary beam focus point and a strong action on the secondary electrons. Beam defocus is exploited to achieve the in situ modulation of the diameter of 3D FEBID structures during growth.

Idioma: Inglés

DOI: 10.1088/1361-6528/ab423c

Año: 2019

Publicado en: Nanotechnology 30, 50 (2019), 505302 [10 pp.]
ISSN: 0957-4484

Factor impacto JCR: 3.551 (2019)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 109 / 314 = 0.347 (2019) - Q2 - T2
Categ. JCR: NANOSCIENCE & NANOTECHNOLOGY rank: 51 / 103 = 0.495 (2019) - Q2 - T2
Categ. JCR: PHYSICS, APPLIED rank: 40 / 154 = 0.26 (2019) - Q2 - T1

Factor impacto SCIMAGO: 1.026 - Materials Science (miscellaneous) (Q1) - Mechanics of Materials (Q1) - Chemistry (miscellaneous) (Q1) - Electrical and Electronic Engineering (Q1) - Mechanical Engineering (Q1) - Nanoscience and Nanotechnology (Q2) - Bioengineering (Q2)

Financiación: info:eu-repo/grantAgreement/ES/DGA/E13-17R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2015-69725-REDT
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-1-R
Financiación: info:eu-repo/grantAgreement/ES/MINECO/MAT2017-82970-C2-2-R

Tipo y forma: Article (PostPrint)

Área (Departamento): Área Cienc.Mater. Ingen.Metal. (Dpto. Ciencia Tecnol.Mater.Fl.)
Área (Departamento): Área Física Materia Condensada (Dpto. Física Materia Condensa.)