Preliminary Modelling and Implementation of the 2D-control for a Nanopositioning Long Range Stage
Resumen: Different systems are recently developed to obtain effective positioning at nanometer scale with increased working ranges. For this purpose, a two-dimensional nanopositioning platform (NanoPla) has been design and manufactured. To assure the demanding metrological performance the drive and control system is being defined and validated. Based on four home-made linear motors as actuators, this work is focused on the study of the control-loop for 1D- and 2D-cases with the aim of the preliminary modelling and posterior implementation. The different required blocks are presented and an initial controller solution is proposed to achieve the established positioning requests.
Idioma: Inglés
DOI: 10.1016/j.proeng.2015.12.566
Año: 2015
Publicado en: Procedia Engineering 132 (2015), 824-831
ISSN: 1877-7058

Factor impacto SCIMAGO: 0.239 - Engineering (miscellaneous)

Financiación: info:eu-repo/grantAgreement/ES/DGA/26FSE
Financiación: info:eu-repo/grantAgreement/ES/MINECO/DPI2010-21629-C02-01
Tipo y forma: Article (Published version)
Área (Departamento): Área Ing. Procesos Fabricación (Dpto. Ingeniería Diseño Fabri.)
Exportado de SIDERAL (2021-01-21-11:00:08)

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