AFM lithography for the definition of nanometre scale gaps: Application to the fabrication of a cantilever-based sensor with electrochemical current detection

Villarroya, M. (Universidad de Zaragoza) ; Pérez-Murano, F. ; Martín, C. ; Davis, Z. ; Boisen, A. ; Esteve, J. ; Figueras, E. ; Montserrat, J. ; Barniol, N.

Resumen: The concept, design and fabrication of a cantilever-based sensor operating in liquid for biochemical applications are reported. A novel approach for detecting the deflection of a functionalized cantilever is proposed. It consists of detecting the change of the electrochemical current level when a voltage is applied between a deflecting cantilever, acting as one of the electrodes, and a reference fixed electrode placed in close proximity to the free extreme of the cantilever. The detection is possible since the distance between the two electrodes is smaller than 50 nm. The sensor is fabricated by using a combination of MEMS technology and AFM-based lithography.

Idioma: Inglés

DOI: 10.1088/0957-4484/15/7/009

Año: 2004

Publicado en: NANOTECHNOLOGY 15, 7 (2004), 771-776
ISSN: 0957-4484

Factor impacto JCR: 3.322 (2004)

Categ. JCR: MATERIALS SCIENCE, MULTIDISCIPLINARY rank: 17 / 177 = 0.096 (2004) - Q1 - T1
Categ. JCR: ENGINEERING, MULTIDISCIPLINARY rank: 1 / 61 = 0.016 (2004) - Q1 - T1
Categ. JCR: PHYSICS, APPLIED rank: 8 / 79 = 0.101 (2004) - Q1 - T1

Financiación: info:eu-repo/grantAgreement/ES/CICYT/DPI2000-0703-C03
Financiación: info:eu-repo/grantAgreement/EUR/FP5/IST-2001-33068

Tipo y forma: Article (PostPrint)

Área (Departamento): Arquitectura y Tecnología de Computadores (Departamento de Informática e Ingeniería de Sistemas)