Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing

Frechilla, Alejandro (Universidad de Zaragoza) ; Napari, Mari ; Strkalj, Nives ; Barriuso, Eduardo ; Niang, Kham ; Hellenbrand, Markus ; Strichovanec, Pavel ; Simanjuntak, Firman Mangasa ; Antorrena, Guillermo ; Flewitt, Andrew ; Magén, César ; de la Fuente, Germán F. ; MacManus-Driscoll, Judith L. ; Angurel, Luis Alberto (Universidad de Zaragoza) ; Pardo, José Ángel (Universidad de Zaragoza)

Resumen: In this work we study the sub-nanosecond laser-induced crystallization of 10 nm-thick atomic layer deposited amorphous Hf0.5Zr0.5O2 (HZO) films in an air atmosphere. We used an infrared laser with 1064 nm wavelength and 800 ps pulses to anneal TiN/HZO/TiN capacitors by scanning an 80 μm-diameter spot along their top surface in a controlled way. The laser annealing process was optimised in terms of fluence to achieve the complete crystallization of HZO into a non-monoclinic polymorph, as demonstrated by X-ray diffraction and transmission electron microscopy. Piezoresponse force microscopy and polarization-field loops confirm that the optimal as-annealed HZO films are piezoelectric and ferroelectric from the first cycle on. Spatial selectivity was accomplished by scanning the laser on selected areas of the samples. Micro-diffraction experiments show that the transition between the crystallized and the amorphous region is abrupt within a distance of several hundred µm.

Idioma: Inglés

DOI: 10.1016/J.APMT.2023.102033

Año: 2024

Publicado en: Applied Materials Today 36 (2024), 102033 [10 pp.]
ISSN: 2352-9407

Financiación: info:eu-repo/grantAgreement/ES/DGA-FEDER E28-23R
Financiación: info:eu-repo/grantAgreement/ES/DGA/T54-23R
Financiación: info:eu-repo/grantAgreement/EC/H2020/882929/EU/Efficient and Robust Oxide Switching/EROS
Financiación: info:eu-repo/grantAgreement/ES/MICINN-AEI/PID2020-112914RB-100/AEI/10.13039/501100011033

Tipo y forma: Artículo (Versión definitiva)

Área (Departamento): Área Cienc.Mater. Ingen.Metal. (Dpto. Ciencia Tecnol.Mater.Fl.)

Dataset asociado: Data of "Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing" ( DOI: 10.5281/zenodo.10213386)